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蓝宝石 > 蓝宝石晶棒/晶碇

    蓝宝石晶棒/晶碇

      Φ2"Epi-Ready Φ4"Epi-Ready Φ6"Epi-Ready
    Diameter 50.8±0.1mm 100.0±0.1mm 150.0±0.2mm
    tdickness 430±10μm 700±15μm 1300±25μm
    Orientation C-plane 0.2°to M-axis±0.1° C-plane 0.2°to M-axis±0.1° C-plane 0.2°to M-axis±0.1°
    C-plane 0°to A-axis±0.1° C-plane 0°to A-axis±0.1° C-plane 0°to A-axis±0.1°
    Orientation flat lengtd 16.0±1.0mm 32.5±1.0mm 50.0±1.0mm
    Primary flat location A-axis±0.2° A-axis±0.3° A-axis±0.3°
    Surface Roughness Ra<0.2nm Ra<0.2nm Ra<0.2nm
    Back side surface 0.8-1.2μm 0.8-1.2μm 0.8-1.2μm
    TTV <10μm <10μm <15μm
    BOW <10μm <10μm <25μm